Plasma processing
- Författare
- Toshiaki Makabe International Conference on Reactive Plasma 1994) Yokohama :
- (Edited by Toshiaki Makabe .., "This special issue is a collecton of review and regular papers presented at the 2nd International Conference on Reactive Plasma (ICRP-2) ... Yokohama, January 19-21, 1994")
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Publication Office, Japanese Journal of Applied Physics | 1994 | Japan, Tokyo | S. 4157-4502 sidor. ill., diagr., tab. |